电子束偏转

三斜板系统电子束偏转量的计算

The Theoretical Analysis and Calculation of the Amount of Electron Beam Deflection of an Electrostatic Deflection System Consisting of Triple-deflective Deflection Plates

本文讨论了与计算机控制系统、工作台驱动系统以及电子束偏转系统有关的一些技术问题并提出了这些技术的发展趋势。

Some technical problems concerned with computer control system , stage driving system , beam deflection system are here discussed to point out their development trends .

评述了平板CRT的基本问题，指出矩阵式驱动和电子束偏转系统结合的平板CRT可能是很有前途的一种方案。

The basic problems of flat panel CRT are reviewed , it is shown that the flat panel CRT which uses a combination of CRT and matrix addressing techniques probably is a scheme having a great future .

以电子束偏转磁场的像差和畸变为目标，对参量进行非劣解中找出贴近理想的最优解。

This paper describes the aberration and distortion of e-beam deflection magnetic field in which the parameters keep close to in the normal solution .

电子束聚焦偏转系统中透镜加工误差效应的数值计算

Numerical computation of processing error effect of lenses in electron beam focusing and deflection systems

叙述了北京FEL谱仪中的控制与扫描系统的基本功能以及用于偏转电子束的慢偏转线圈的磁场分析及其微秒脉冲电流源性能。

The fundamental functions of the control and scanning system in the Beijing FEL spectrometer are reported . The magnetic field analysis of the slow deflection coil and the specification of the microsecond pulse generator are introduced .

电子束曝光机偏转系统及可动物镜分析

Deflecting System and Moving Objective Lens in Electron Beam Exposure Machine

电子束静电折板偏转系统研究

Studies on Electrostatic Deflection of Folded Plate for E-beam Lithography Machine

电子束聚焦和偏转系统中动态修正的计算

The computation of dynamic correction in electron beam focusing and deflection systems

多极靴结构的扫描偏转线圈可以实现电子束的精确偏转控制，产生多束流。

It can achieve the precise control of deflection of the electron beam and generate the multi-beam by using the scanning deflection coil with multi pole shoe structure .

在电子束聚焦和偏转系统中动态修正方法（即用场曲校正透镜和消象散器来消除偏转场曲和象散）可以相当显著地减小系统的总象差和提高系统的电子光学性能。

In electron focusing and deflection systems the method of dynamic correction ( i.e. the application of field curvature correction lenses and stigmators ) can significantly reduce the overall aberration and greatly improve the optical properties of systems .

本文将重点介绍DY－5型电子束曝光机的偏转系统的构成、特点及结果。

The paper presents the constitution features and experimental results of deflection system of the DY-5 electron beam exposure machine .

电子束大扫描场偏转系统设计中，像差的确定是一个必须解决的实际问题。

In the design of electron beam deflection system with a large scanning field , determination of aberration is a practical problem .

并使用计算机辅助设计研究电子束曝光机聚焦偏转系统的结构。

The structure of the electron beam focusing and deflection system of electron beam exposure machine is analysed with computer aided design ( CAD ) .

对300keV，5电极负离子束系统的初步优化结果表明：该系统磁场可将伴随引出的电子束在低能下偏转到作为电子接收极的引出电极上；

The initial optimized results of the 300 keV , 5 electrodes negative ion beam system show : The magnetic field of this system can deflect the electron beam to the extraction electrode as electron acceptor at lower energy ;

为使电子枪形成的电子束偏转180°或270°来加热金属，又进行了线圈磁场的理论计算，并采用等B磁铁设计，产生满足要求的均匀磁场。

In order to deflect the electron beam about 180 ° or 270 ° to heat metal , magnetic field was calculated and the magnet iron was designed to generate the adequate uniform magnetic field .

我们改装了日立S530型扫描电子显微镜，使之具有外控电子束偏转功能。

We modified the HITACHI S530 scanning electron microscope adding to it function of external control of electron beam deflection .

超快电子衍射系统的理论研究，主要内容有扫描状态下电子束偏转距离的计算公式的推导，并由此得出一套测量、计算电子束脉宽的方法；

The research on the theory of the UED system , especially the deflection distance under scanning , from which we get another method to measure and calculate the pulse width of electron beams .