本文研究了六种新的聚酯型负性光致抗蚀剂的合成，分别测定了它们的UV、IR、DTA和光刻性能。
A study of the synthesis of six new polyester type negative photoresists , together with their UV , IR , DIA and photoetching properties is made by the authors .
负性光致抗蚀剂