电子束蒸发

氧和氩等离子辅助电子束蒸发制备高质量ZnO薄膜

High Quality ZnO Thin Films Prepared by O_2 and Ar Plasma-assisted E-beam Evaporation

本论文利用磁控溅射和电子束蒸发方法制备ZnO薄膜，研究制备工艺条件对ZnO薄膜性能的影响。

In the dissertation , ZnO films have been prepared by magnetron sputtering and E-beam evaporation methods .

电子束蒸发的α-Si（1-x）Cox薄膜的光吸收特性

Optical absorption of electron-beam evaporated a-si_ ( 1-x ) co_x films

电子束蒸发Ar离子辅助沉积Si光学薄膜的特性

Optical Characteristics of Si Films by Ar Assisted Electron Beam Evaporation Deposition

电子束蒸发制备ZnO薄膜及其晶体结构和电学性质

Structures and Electric Properties of ZnO Thin Films Prepared by Electron Beam Evaporation

电子束蒸发太阳能电池窗口层ZnO薄膜

Solar Cell Window Layer of ZnO Thin Films Prepared by Electron Beam Evaporation

电子束蒸发制备CdS多晶薄膜及性质研究

Growth and Characterization of CdS Polycrystalline Films by Electron Beam Evaporation

使用高真空电子束蒸发在p型Si（100）衬底上制备了高kHfO2薄膜。

High k dielectric HfO 2 films were deposited on p type Si ( 100 ) substrates by e beam evaporation .

电子束蒸发a-Si（1-x）Ndx薄膜的ESR研究

ESR studies of electron beam evaporated a-si_ ( 1-x ) nd_x films

在GaAs上用电子束蒸发淀积LaB6薄膜及其界面的电学特性

Lab_6 film deposited on GaAs by electron beam evaporation and its interface electronic characteristics

电子束蒸发Al2O3/TiO2复合膜及在无机EL中的应用

Preparation of Al_2O_3-TiO_2 Composite Thin Films by Electron Beam Evaporation and Their Applications in TFEL Devices

方法：用电子束蒸发和射频磁控溅射两种技术制备了天然HA薄膜。

Methods : The nature HA films were prepared by electron beam evaporation and rf-magnetron sputtering techniques .

本文研究了电子束蒸发的掺过渡金属元素Cr的非晶硅基薄膜a-Si（1-x）Crx的光吸收特性。

The optical absorption properties of electron-beam-evaporated a-Si_ ( 1-x ) Cr_x , films have beem studied .

电子束蒸发在Si衬底上制备MgB2超导薄膜

MgB_2 Superconducting Thin Films Deposited by E-beam Evaporation on Si Substrate

基片温度对电子束蒸发的ZnS薄膜性能的影响

Influence of substrate temperature on properties of ZnS films prepared by electron-beam evaporation

用电子束蒸发法低温无损情况下在有机柔性衬底上制作ITO膜及其性能研究

Non-Destructive , Low Temperature Growth of Indium-Tin-Oxide Films on Flexible Organic Substrates by Electron Beam Evaporation

采用电子束蒸发和键合技术，制作了具有高反射率的、表面为薄层单晶Si的分布Bragg反射器。

Si distributed Bragg reflector with crystal Si thin film on the reflector was fabricated by electron beam evaporation and bonding techniques .

电子束蒸发制备HfO2高k薄膜的结构特性

Structural characteristics of HfO_2 films grown by e-beam evaporation

用电子束蒸发法制备ZrO2薄膜

ZrO_2 Thin Films Prepared by Electron Beam Vapour Deposition

电子束蒸发在不同Ar气氛下外退火制备MgB2超导薄膜

Superconducting mgb_2 films via ex-situ annealing under different Ar pressure prepared by e-beam evaporation

电子束蒸发沉积ZAO薄膜正交试验

Electron Beam Evaporation Deposited ZAO Thin Films by Orthogonal Experiment

电子束蒸发沉积工艺条件对ZrO2薄膜性能的影响

Influence of Process Conditions on Properties of ZrO_2 Coatings Prepared by Electron Beam Evaporation

氧分压对电子束蒸发SiO2薄膜机械性质和光学性质的影响

Influence of Oxygen Partial Pressure on the Mechanical and Optical Properties of SiO_2 Films Prepared by Electron Beam Evaporation

通过热氧化氟化锌（ZnF2）薄膜的方法制备出氟掺杂的多晶ZnO薄膜，ZnF2薄膜是利用电子束蒸发方法沉积在Si（100）衬底得到的。

F-passivated ZnO nanocrystalline films were prepared from thermal oxidation of ZnF_2 films . The ZnF_2 films were deposited on a Si wafer by electron beam evaporation technique .

本文在Si基底上利用电子束蒸发沉积的Cu膜为样品，通过热退火制备CuO纳米线。

In the dissertation , CuO nanowires were successfully synthesized by thermal annealing of copper thin films which deposited by electron beam current on silicon substrate .

用改进的电子束蒸发系统制作了结构为ITO/CuPc/TPD/Alq3/MgAg的有机EL数码显示器件，并对器件进行了实用化封装。

The organic EL digital display element with the ITO / CuPc / TPD / Alq 3 / MgAg structure has been reported .

采用电子束蒸发沉积制备了不同基底温度的ZrO2单层薄膜。

In this paper , ZrO_2 films were deposited at different substrate temperature by electron beam evaporation .

超高真空电子束蒸发合成晶态AlN薄膜的研究

Synthesis of AlN films by nitridation of Al films evaporated on si ( 100 ) substrate by UHV electron beam

采用电子束蒸发ZnF2结合热氧化的方法制备了F掺杂的ZnO多晶薄膜。

(ⅱ) F-doped ZnO polycrystalline films were prepared from thermal oxidation of ZnF_2 film grown by electron beam evaporation .

电子束蒸发制备抗激光损伤ZrO2/SiO2膜系及表面特征研究

A Study on the ZrO_2 / SiO_2 Flims of High Laser Induced Damage Threshold Prepared by E-beam Evaporating