阿贝误差
- 网络abbe;Abbe Error
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本文分析了FCG-1型仿形仪的静态精度,指出对静态精度有较大影响的因素是传感器的X,Y,Z三个轴的垂直度误差;阿贝误差;
The static accuracy of FCG-1 Tracer is analysed in the paper , the factors effecting the static accuracy are the verticality errors of X , Y and Z axes , Abbe error , probe deformation and temperature .
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用于阿贝误差实时修正的三通道激光干涉仪的研究
The Study On Three-Channel Laser Interferometer For Real-Time Correction of Abbe Error
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系统的高精度是通过3个微型激光干涉仪的零阿贝误差设置,一个表面传感AFM测头以及两个角度传感器实现。
The high accuracy is obtained by a zero Abbe offset arrangement with three plane mirror miniature interferometers , a surface-sensing probe and two angular sensors .
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设计并研制成功了150×150×6mm3范围可免阿贝误差的纳米工作台,以大行程柔性铰链结构和磁力卸载装置,解决了商用微动工作台承载能力不足的技术问题。
A nano-positioning Abbe-free stage with the movement range of 150 × 150 × 6mm3 , has been designed and implemented successfully . The performance of load-carrying of commercial PZT stage has been extended with long range flexure hinges and magnetism-unloading equipment .
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实现了无阿贝误差的三维激光干涉测量系统。
An Abbe-error free three dimensional laser interferometer has been realized .
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一维加工设备阿贝误差实时修正方法的研究
The Study on Real-Time Correction for Abbe Error of one Dimensional Manufacturing Equipment
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消除阿贝误差的一种新方法
A New Method to Compensate the Abbe Error
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无阿贝误差计量型原子力显微镜
Metrological Atomic Force Microscope with Zero Abbe Offset
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用双频激光干涉仪实时修正阿贝误差的方法和实验
Use Double Frequency Laser Interferometer to Make Real Time Correction of Abbe Error and Its Test
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系统具有稳定,刚性好,符合阿贝误差原理设计的特性。
The system is stable and rigid , and it accords with Abbe error design principle . 3 .
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本文从排列组合原理出发,利用坐标变换法研究了阿贝误差问题。
In line with the principle of arraycombination , the Abbe error problem has been studied in this paper by the help of coordinate transformation .
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经理论研究计算,能实现近零阿贝误差,满足微纳米级定位平台的要求。
Theorial study and calculation show that Abbe error can be decreased to almost zero by use of the structure and it can meet the demand of nano-platform .
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分析了双基圆盘式渐开线测量仪的测量原理,其具有结构简单、测量过程中无测头位置引起的阿贝误差等特点。
A double-disc mode instrument for measuring involute tooth profile is analyzed , which has some advantages , such as simple structure , no Abbe error caused by the stylus , etc.
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为高精度导轨直线度的测量以及阿贝误差补偿方面打下了基础,具有一定的理论意义和工程实用价值。
It lays the foundation for the measurement of straightness of high precision guide , as well as the compensation of Abbe error , which has a certain theoretical significance and engineering value .
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该方法简单而易于实现,可应用于多种光学测长系统以有效地消除阿贝误差的影响,提高测量系统的精度。
This optical system is very simple and can be realized conveniently . It can be used to compensate the Abbe error of some optical length measuring instruments inorder to improve its measuring accuracy .
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该方案采用激光准直瞄准定位,以测量瞄准误差为补偿,其合理的光路设计清除了阿贝误差,提高了瞄准精度。
The method adopts laser collimation to target the location , takes the collimating error as compensation , and the reasonable design of light path clears the Abbe error , as a result , the collimation precision is improved .
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长度测量中违背阿贝原则产生误差的平行尺补偿
Using two rulers to compensate the error occurred from inconformity with Abbe 's length measurement principle