微细加工技术

基于一种新微细加工技术的亚波长光栅的研制

Sub - Wavelength Gratings Based on a New Microfabrication Technology

近年来，随着市场需求的导向和微细加工技术的发展，光谱仪呈现出微型化趋势。

The spectrometer present a trend of microminiaturization in recent years along with the improve of the demand of the market and the development of microfabrication technology .

介绍了一种通过微细加工技术即二次X射线曝光制作凹面光栅的方法。

The technique of fabricating concave gratings in PMMA by double X-ray exposures is described .

微机械（MEMS）与微细加工技术

The new development of MEMS and micro-machining

微机电系统（MEMS）的发展，带动了微细加工技术的发展。

With the development of the Micro Electro Mechanical System ( MEMS ), mico-machining technologies grows rapidly .

通过离子束技术和微细加工技术可以实现DLC薄膜的图形化并能大大提高薄膜的场发射性能。

A patterned DLC thin film cathode was fabricated by reactive-ion etching method and mic ro-fabrication technology .

描述了一种新的亚波长光栅的微细加工技术，即电子束（EB）扫描曝光得到相应的亚微米级的线宽图形，再利用快速原子束刻蚀设备获得了高深宽比的立体结构。

A new microfabrication method electron beam scanning exposure and fast atom beam etching to fabricate sub wavelength gratings is described .

MEMS技术将是21世纪科技与产业的制高点之一，而微细加工技术又是MEMS发展的重要基础。

MEMS technology is a hot spot of science and industry in the 21st century , and micro fabrication technologies are the key problems of MEMS development .

采用微细加工技术研制压控振荡器用BST薄膜变容管。

The BST thin films varactor used in voltage-controlled oscillator were fabricated using micro-fabricated techniques in this paper .

文章综述了用于制备MEMS器件的几种典型微细加工技术的工艺原理、特点以及研究现状，并展望了这些微细加工技术的发展前景。

The principle of process , characteristic and research status on the several typical microfabrication techniques used to fabricate MEMS devices are given a review in this paper .

微机电系统技术（MEMS）是随着半导体集成电路微细加工技术和超精密机械加工技术的发展而发展起来的。

Micro-Electro-Mechanical System ( briefly named MEMS ) has grown up along with the development of semiconductor 's integrate circuit minuteness machine technology and exceed exactitude machine process technology .

近年来，随着MEMS研究及其应用的快速发展，微细加工技术作为其中的一个重要组成部分，获得了长足的进步。

With the fast development of research and application of MEMS in recent years , micromachining technology has made great progress as an important part of MEMS as well .

利用薄膜工艺和微细加工技术，将NiFe合金或NiCo合金真空蒸镀或溅射在玻璃或石英基片上，制作的磁阻传感器具有广泛的用途。

By use of thin-film technology and microprocessing technique Ni-Fe or Ni-Co alloy is evaporated or sputtered in vacuum onto glass or quartz substrate . Reluctive sensors made in such way have wide application .

微细加工技术作为MEMS技术从设计到产品化的整个过程中最关键和基础的环节，已成为当前MEMS技术研究的热点。

Micro-fabrication technology is the most basic and crucial step of the MEMS technology , from designing to production . It has become one of the hotspots in present MEMS research .

软X射线聚焦波带片的研制包括光路设计、膜系设计、衬底选择、薄膜制备、亚微米光刻、X射线光刻、反应离子刻蚀、离子束刻蚀、电镀和化学腐蚀等多种微细加工技术。

The development of soft X-ray CZP included design of optical path , selection of material , preparation of thin film , sub-micron lithography , X-ray lithography , reactive ion etching , ion beam etching , electroplating and chemical etching .

采用先进的LPE及反应离子刻蚀等微细加工技术制作了盘型－图钉式微腔结构，测得其有源区的光荧光谱的半宽度为0.032eV，波长为815.33nm。

The measured half width of photoluminescence spectrum in the active area is 0.032 eV with the wavelength of 815.33 nm .

而随着微机械技术的发展，微细加工技术更加多样，MEMS基片的结构将更加复杂，因此探索一种新的能够满足要求的测量方法势在必行。

Along with the development of Micro Electrical Mechanical System ( MEMS ) technology , the MEMS manufacture technology will take on diversification , and the structure of MEMS chip will become more and more complex .

单片OEICs的激光微细加工技术研究

Study on Laser Assisted Microprocessing for Fabrication of Monolithic OEICs

微细加工技术在传统光刻工艺的基础上，又发展了灰调光刻、liftoff、LIGA及准LIGA、激光和分子装配等适应三维结构的新技术。

The new micro fabrication technologies for 3D structure are invented , which include gray tone lithography , Lift Off , LIGA , quasi LIGA , laser , molecule assembly technology , etc.

随着微系统技术（MST）、微机电系统（MEMS）的产业化，微细加工技术成为机械制造领域新的研究与应用热点。

With the industrialization of micro system technology ( MST ) and micro electro mechanical systems ( MEMS ), micro processing technology becomes a new research and application hot spot in the field of machinery manufacturing .

本论文基于硅基微细加工技术，按照硅基MEMS微型传感器的器件结构，利用现有设备条件，对表面牺牲层MEMS工艺以及体硅MEMS工艺中部分关键技术进行工艺摸索。

This thesis based on micro fabrication technology , according to the structure of silicon based MEMS micro sensor device , utilized equipment in existence developed and optimized a few key processes of MEMS sacrificial-layer process and MEMS bulk process based on silicon .

微细加工技术已成为克服MEMS技术局限的重要技术，具有高效率、高柔性、能加工复杂三维形状和多种材料的特点，已成为非常活跃的研究热点。

With the characteristics of high efficiency , high flexibility and capability of machining complicated three-dimensional parts in a wide range of materials , micro-machining Technology has become a very important means against the limitation in MEMS and become the most active and hot research subject .

这一类利用微细加工技术，特别是深刻技术，如LIGA，DEM，DXRL、DRIE等，制作的真空器件，已经形成一门新兴的交叉学科，微真空电子学及相应的技术和应用。

This kind of vacuum devices with frequencies from W band to terahertz using LIGA , DRIE , DXRL , and DRIE deep etching technologies are emerging as a new subject : Micro-Vacuum Electronics .

SiNx薄膜的图案化工作采用的是半导体工艺中微细加工技术，主要包括光刻与刻蚀工艺，实验中采用投影式曝光及反应离子刻蚀（RIE）的方法来完成该掩模的图案化。

The patterning of SiNx film was done by the micromachining technologies of semiconductor technologies , mainly including photo - lithography and etching , and in this paper the patterning of mask layer was done by projection exposure method and reactive ion etching ( RIE ) .

随着微细加工技术的发展，人们已经能够制备出光波范围的电介质微腔。

With the development of micro-fabrication , optical microcavities are available .

微成形是微细加工技术群体中的一项技术。

Micro-forming is one of the key technologies in micro-fabrication technology .

聚焦离子束微细加工技术实验研究

Experimental studies on microfabrication process with focused submicron ion beam

简要介绍了等离子体技术和微细加工技术。

Plasma technology and micro process technology are presented simply .

微细加工技术在国内外发展趋势的研究

The Developing Trend of Micro-processing Technology at Home and Aboard

双光子三维微细加工技术及实验系统的开发

2 - photon 3-D microfabrication technology and its experimental system