团簇束

用离子团簇束及反应离子团簇束技术沉积Zn及ZnO薄膜

Zn and ZnO Films Deposited by Ionized Cluster Beam and Reaction Ionized Cluster Beam Techniques

Se低能中性团簇束流淀积

Low energy se cluster beam deposition

利用MeV量级能量的团簇束即可达到GeV重原子离子在物质中的能量沉积密度，在这种条件下，载能团簇与物质作用将成为丰富新现象的源泉。

The extremely high density of deposited energy of GeV heavy ion can be reached with MeV cluster beams . Under this conditions new phenomena should be discovered .

对于团簇束沉积，当偏压大于一定值时（在本实验条件下偏压≥3kV），薄膜才开始以Mo（110）择优取向生长。

Only for the accelerated voltage higher than a threshold voltage (≥ 3 kV in this experiment ), can the ( 110 ) oriented Mo thin film by the cluster beam deposition grow up .

荷能团簇束成膜的表面迁移和附着特性的研究

A study on the properties of surface migration and adhesion during energetic cluster impact deposition

载能钼团簇束与单晶硅碰撞室温下合成二硅化钼

Synthesis of MoSi_2 by energetic molybdenum cluster beam deposited on monocrystalline silicon at room temperature

铜团簇束在硅上碰撞沉积的薄膜表面能谱分析

The analysis of XPS spectrum of thin films formed by Cu cluster beam deposited onto Si substrate

特别是低能团簇束沉积（LEBCD）组装纳米薄膜已成为材料科学研究的热点之一。

Especially assembling nano-film by low energy beam of cluster deposition has become one of the hot topic in material science .

MeV原子团簇离子束的产生、鉴定及其与固体的作用

Production , identification of MeV atomic cluster beams and their interactions with solids

一个高密度连续射流团簇离子束源

A High Intensity Continuous Cluster Ion Source