朗缪尔探针

面发光度的特性，与朗缪尔探针、X射线探测器、反磁探针等测量结果相结合，给出了MM-2装置中ECRH等离子体的H。

This method combined with the Langmuir probe , X-ray detector and diamagnetic probe , etc , gives the properties of the pre-ionization and time feature of Ha emission of ECRH plasma .

开发了一个朗缪尔探针等离子体诊断系统对PECVD真空镀膜机进行了等离子体参数诊断。

A new plasma diagnostic system with Langmuir probe is designed to measure the plasma parameters in a plasma enhanced chemical vapor deposition ( PECVD ) vacuum coating machine .

采用朗缪尔探针测量了不同参数下反应容器中轴向方向上离子密度分布情况，并且采用UV-visible测试分析了DLC薄膜在轴向方向的均匀性。

The distribution of ion density along the axial direction at different parameters were measured by Langmuir probe . The optical properties of DLC films in the axial direction were also investigated by UV-VIS spectra .

本文完成的主要工作归纳为以下几点：1.结合了微波ECR等离子体的特点以及等离子体探针诊断技术，设计了一种新型的朗缪尔探针，很好的解决了真空密封和微波泄漏的问题。

On the base of the knowledge of Microwave ECR plasma and probe diagnostics technology , this thesis designs a newly Langmuir probe and solves the problems of the microwave leaking and vacuum seal . 2 .

对于低压、稳定等离子体的诊断，应用最多的仍然是探针法，其中以朗缪尔探针最为人们所熟悉。

The Langmuir probe is a well-established diagnostic tool for low-pressure , stationary plasma .

本文设计了一种基于采集卡的新型朗缪尔探针诊断系统，主要由采集卡、扫描电源电路、电压和电流检测电路、硬件抗干扰环节以及相应的软件构成。

The system is mainly constituted with the acquisition card , scan power supply circuit , voltage and current detection circuits , part of hardware for anti-jamming and corresponding software .

朗缪尔探针设备简单的优点也带来了弊端，就是抗干扰性较差，采集数据的过程中很容易受到干扰。

There are drawbacks coming after the benefits of the simple equipment of the Langmuir probe , such as poor in interference and vulnerable to interference in the process of collecting data .

朗缪尔探针法因其装置结构简单、成本低廉以及获得的等离子体信息相对较丰富，而成为目前应用最广泛的一种低温等离子体诊断方法。

Langmuir probe device has became the most widely used diagnostic method of low-temperature plasma , because of its simple structure , low cost , as well as can obtain rich relatively information of plasma .

然而，目前国内多数朗缪尔探针系统还是由分离元件临时搭建，以人工调节的方式进行测量，不仅速度慢、精确度低，而且抗干扰能力不强。

However , at present , the most domestic Langmuir probe systems are build by separative element temporarily , working with manual regulation , not only slow , low accuracy , but do not have a strong anti-interference ability .

HL-2A装置中平面边缘的等离子体特性通过磁力传动的马赫/雷诺协强/朗缪尔10探针组进行了研究。

Experimental results of plasma characteristics in several discharges have been obtained in the plasma boundary region of the HL-2A tokamak using a multi-array of Mach / Reynolds stress / Langmuir 10 probes .

并用朗缪尔静电探针测量了电弧等离子体参数。

Plasma parameters of the arc were measured using Langmuir probes .

利用朗缪尔双探针诊断电弧离子镀等离子体参数

Plasma Parameter Diagnosis on Arc Ion Plating by Langmuir Probe

本文利用基于虚拟仪器的朗缪尔双探针系统对电弧离子镀等离子体进行了诊断研究。

A novel technique was developed to diagnose arc ion plating plasma with a Langmuir double probes .

等离子体的参数通过朗缪尔双探针、多通道光谱仪等设备来进行诊断。

The parameters of the generated plasma are diagnosed by Langmuir dual probe and multi-channel optical emission spectroscopy ( OES ) .

并与传统的朗缪尔双探针法作比较。两种方法测试结果颇相符合。

The results obtained have been compared with those of the classical Langmuir double probe method , being quite close to each other .

测量的结果表明，利用单探针测量的主等离子体边缘参数与朗缪尔四探针测量结果基本一致。

The results obtained show that radial profiles of the temperature and the density measured with the single probe are in agreement to those with a four-probe system .

本论文的主要内容为：1.设计了一种新型的朗缪尔静电探针，很好地解决了真空密封，微波泄漏等问题，分析了静电探针使用中的几个问题并提出了解决方法。

Designed a newly Langmuir probe , solved the problem of the wave leaking out and vacuum seal , besides , analyzed some troubles in its performance and gave the solving methods . 2 .

本文的主要工作是设计了两种探针，第一种采用朗缪尔单探针，第二种是采用的发射探针，并且根据两种不同的探针设计了相关的探针诊断电路。

The main work is to design the two probes , the first single-use Langmuir Probe , the second is the Emissive Probe . According to two different probe design a probe related to the diagnostic electrocircuit .